NANO 2298 Photolithography (4 cr)

Prereq: NANO 1294

The process of photolithography as it is used in the semiconductor industry for transferring a pattern from the mask to the wafer. Photo masking overview, optics and wavelength, photo resist chemistry, masking and reticules, steppers and their individual components and adjustments, measuring equipment related to dimensional inspection, resistivity, flatness and thickness, coating, baking, developing, and the use of equipment that affect the production of a successful product.